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Authors & Contributions

PiezoMEMS 2027 invites contributions from industry, research organizations and academia on original work, technology developments and application-driven results related to PiezoMEMS. Both oral and poster contributions are planned.

Important Dates

Abstract submission deadline: November 08, 2026

There will be no conference proceedings, special journal issue, or similar publication.

Topics of Interest

    • MEMS-based solutions and use-case creation.
    • Commercialization enablers, services and business models.
    • Scalability of production for PiezoMEMS technologies.
    • Materials, design tools and platforms, and technology enablers.
    • Failure mechanisms of PiezoMEMS, modeling and characterization.
    • Materials for MEMS reliability and rugged device design.
    • Product and system design for reliability.
    • Quality control methods.
    • Tools and technologies for thin-film piezoelectric and PiezoMEMS fabrication processing.
    • Technologies for co-existence of processes and contamination containment.
    • Piezoelectric MEMS process platforms.
    • Polarization control of piezoelectric materials with focus on MEMS applications.
    • Ultra-thin piezo and ferroelectrics, magnetoelectrics, multiferroics, and piezo control of semiconductors for MEMS.
    • Flexible, organic and other non-conventional piezoelectric materials.
    • Emerging applications of piezoelectric materials and devices, including multimodal sensors, photonic and piezoelectric hybrids, quantum devices and systems, and bioelectronics sensing.
    • Focused applications: biomedical imaging, timing devices, acoustic wave sensors, RF front-end modules, and PiezoMEMS technologies and devices to realize them.
    • Metrology and characterization of materials and devices.
    • Novel design methodologies, with focus on design for manufacturability and reliability/yield.
    • Theory, simulation and modeling tools of materials and devices, including productivity/PDK tools.
    • Priority topics: model validation, calibration and scalability; reliability, yield and DFM.
SUBMIT ABSTRACT

Submission Requirements

  • Abstract length: 1 page, including references
  • Figures / graphics: up to 1/2 additional page, 1-4 figures
  • Abstracts should clearly communicate the novelty, technical or industrial relevance, key results and conclusions.
  • Submissions should present results and conclusions, not only project intentions.
  • Submissions will be reviewed by the Technical Program Committee based on quality, originality and relevance to the workshop scope.
  • At least one author of each accepted contribution must register and present on site.
  • The Technical Program Committee will assign the presentation format (oral or poster).